5/11/2010	8:16:53 AM	Recipe started at 8:16 AM
5/11/2010	8:16:53 AM	BCl3 valve closed
5/11/2010	8:16:53 AM	PH3 valve closed
5/11/2010	8:16:53 AM	SiCl4 pre valve closed
5/11/2010	8:16:53 AM	SiCl4 post valve closed
5/11/2010	8:16:53 AM	Main Vac valve closed
5/11/2010	8:16:53 AM	Bypass valve closed
5/11/2010	8:16:53 AM	Bubbler valve closed
5/11/2010	8:16:53 AM	Helium valve opened
5/11/2010	8:16:53 AM	H2 valve opened
5/11/2010	8:16:53 AM	Helium MFC set to  475.000000
5/11/2010	8:16:53 AM	H2 MFC set to  25.000000
5/11/2010	8:16:53 AM	BCl3 MFC set to  0.000000
5/11/2010	8:16:53 AM	SiCl4 MFC set to  0.000000
5/11/2010	8:16:53 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	8:16:53 AM	Tube furnace set to 200
5/11/2010	8:18:16 AM	BCl3 valve closed
5/11/2010	8:18:16 AM	PH3 valve closed
5/11/2010	8:18:16 AM	SiCl4 pre valve closed
5/11/2010	8:18:16 AM	SiCl4 post valve closed
5/11/2010	8:18:16 AM	Main Vac valve closed
5/11/2010	8:18:16 AM	Bypass valve closed
5/11/2010	8:18:16 AM	Helium valve opened
5/11/2010	8:18:16 AM	H2 valve opened
5/11/2010	8:18:16 AM	Bubbler valve opened
5/11/2010	8:18:16 AM	Helium MFC set to  475.000000
5/11/2010	8:18:16 AM	H2 MFC set to  25.000000
5/11/2010	8:18:16 AM	BCl3 MFC set to  0.000000
5/11/2010	8:18:16 AM	SiCl4 MFC set to  0.000000
5/11/2010	8:18:16 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	8:18:16 AM	Tube furnace set to 200
5/11/2010	8:48:16 AM	H2 valve closed
5/11/2010	8:48:16 AM	BCl3 valve closed
5/11/2010	8:48:16 AM	PH3 valve closed
5/11/2010	8:48:16 AM	SiCl4 pre valve closed
5/11/2010	8:48:16 AM	SiCl4 post valve closed
5/11/2010	8:48:16 AM	Main Vac valve closed
5/11/2010	8:48:16 AM	Bypass valve closed
5/11/2010	8:48:16 AM	Helium valve opened
5/11/2010	8:48:16 AM	Bubbler valve opened
5/11/2010	8:48:16 AM	Helium MFC set to  500.000000
5/11/2010	8:48:16 AM	H2 MFC set to  0.000000
5/11/2010	8:48:16 AM	BCl3 MFC set to  0.000000
5/11/2010	8:48:16 AM	SiCl4 MFC set to  0.000000
5/11/2010	8:48:16 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	8:48:16 AM	Tube furnace set to 0
5/11/2010	8:58:16 AM	Helium valve closed
5/11/2010	8:58:16 AM	H2 valve closed
5/11/2010	8:58:16 AM	BCl3 valve closed
5/11/2010	8:58:16 AM	PH3 valve closed
5/11/2010	8:58:16 AM	SiCl4 pre valve closed
5/11/2010	8:58:16 AM	SiCl4 post valve closed
5/11/2010	8:58:16 AM	Main Vac valve closed
5/11/2010	8:58:16 AM	Bypass valve closed
5/11/2010	8:58:16 AM	Bubbler valve closed
5/11/2010	8:58:16 AM	Helium MFC set to  0.000000
5/11/2010	8:58:16 AM	H2 MFC set to  0.000000
5/11/2010	8:58:16 AM	BCl3 MFC set to  0.000000
5/11/2010	8:58:16 AM	SiCl4 MFC set to  0.000000
5/11/2010	8:58:16 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	8:58:16 AM	Tube furnace set to 0
5/11/2010	8:58:16 AM	Run finished at 8:58 AM
5/11/2010	9:15:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2010	9:15:13 AM	Recipe started at 9:15 AM
5/11/2010	9:15:13 AM	H2 valve closed
5/11/2010	9:15:13 AM	BCl3 valve closed
5/11/2010	9:15:13 AM	PH3 valve closed
5/11/2010	9:15:13 AM	SiCl4 pre valve closed
5/11/2010	9:15:13 AM	SiCl4 post valve closed
5/11/2010	9:15:13 AM	Main Vac valve closed
5/11/2010	9:15:13 AM	Bypass valve closed
5/11/2010	9:15:13 AM	Bubbler valve closed
5/11/2010	9:15:13 AM	Helium valve opened
5/11/2010	9:15:13 AM	Helium MFC set to  500.000000
5/11/2010	9:15:13 AM	H2 MFC set to  0.000000
5/11/2010	9:15:13 AM	BCl3 MFC set to  0.000000
5/11/2010	9:15:13 AM	SiCl4 MFC set to  0.000000
5/11/2010	9:15:13 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	9:15:14 AM	Tube furnace set to 0
5/11/2010	9:15:16 AM	Helium valve closed
5/11/2010	9:15:16 AM	H2 valve closed
5/11/2010	9:15:16 AM	BCl3 valve closed
5/11/2010	9:15:16 AM	PH3 valve closed
5/11/2010	9:15:16 AM	SiCl4 pre valve closed
5/11/2010	9:15:16 AM	SiCl4 post valve closed
5/11/2010	9:15:16 AM	Main Vac valve closed
5/11/2010	9:15:16 AM	Bypass valve closed
5/11/2010	9:15:16 AM	Bubbler valve closed
5/11/2010	9:15:16 AM	Helium MFC set to  0.000000
5/11/2010	9:15:16 AM	H2 MFC set to  0.000000
5/11/2010	9:15:16 AM	BCl3 MFC set to  0.000000
5/11/2010	9:15:16 AM	SiCl4 MFC set to  0.000000
5/11/2010	9:15:16 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	9:15:16 AM	Tube furnace set to 0
5/11/2010	9:15:17 AM	Run finished at 9:15 AM
5/11/2010	9:15:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2010	9:16:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	9:16:25 AM	Recipe started at 9:16 AM
5/11/2010	9:16:25 AM	Helium valve closed
5/11/2010	9:16:25 AM	H2 valve closed
5/11/2010	9:16:25 AM	BCl3 valve closed
5/11/2010	9:16:25 AM	PH3 valve closed
5/11/2010	9:16:25 AM	SiCl4 pre valve closed
5/11/2010	9:16:25 AM	SiCl4 post valve closed
5/11/2010	9:16:25 AM	Main Vac valve closed
5/11/2010	9:16:25 AM	Bubbler valve closed
5/11/2010	9:16:25 AM	Bypass valve opened
5/11/2010	9:16:25 AM	Helium MFC set to  0.000000
5/11/2010	9:16:25 AM	H2 MFC set to  0.000000
5/11/2010	9:16:25 AM	BCl3 MFC set to  0.000000
5/11/2010	9:16:25 AM	SiCl4 MFC set to  0.000000
5/11/2010	9:16:25 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	9:16:25 AM	Tube furnace set to 0
5/11/2010	9:16:57 AM	Helium valve closed
5/11/2010	9:16:57 AM	H2 valve closed
5/11/2010	9:16:57 AM	BCl3 valve closed
5/11/2010	9:16:57 AM	PH3 valve closed
5/11/2010	9:16:57 AM	SiCl4 pre valve closed
5/11/2010	9:16:57 AM	SiCl4 post valve closed
5/11/2010	9:16:57 AM	Bubbler valve closed
5/11/2010	9:16:57 AM	Main Vac valve opened
5/11/2010	9:16:57 AM	Bypass valve opened
5/11/2010	9:16:57 AM	Helium MFC set to  0.000000
5/11/2010	9:16:57 AM	H2 MFC set to  0.000000
5/11/2010	9:16:57 AM	BCl3 MFC set to  0.000000
5/11/2010	9:16:57 AM	SiCl4 MFC set to  0.000000
5/11/2010	9:16:58 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	9:16:58 AM	Tube furnace set to 0
5/11/2010	9:16:58 AM	Run finished at 9:16 AM
5/11/2010	9:16:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	9:39:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2010	9:39:43 AM	Recipe started at 9:39 AM
5/11/2010	9:39:43 AM	H2 valve closed
5/11/2010	9:39:43 AM	BCl3 valve closed
5/11/2010	9:39:43 AM	PH3 valve closed
5/11/2010	9:39:43 AM	SiCl4 pre valve closed
5/11/2010	9:39:43 AM	SiCl4 post valve closed
5/11/2010	9:39:43 AM	Main Vac valve closed
5/11/2010	9:39:43 AM	Bypass valve closed
5/11/2010	9:39:43 AM	Bubbler valve closed
5/11/2010	9:39:43 AM	Helium valve opened
5/11/2010	9:39:43 AM	Helium MFC set to  500.000000
5/11/2010	9:39:43 AM	H2 MFC set to  0.000000
5/11/2010	9:39:43 AM	BCl3 MFC set to  0.000000
5/11/2010	9:39:43 AM	SiCl4 MFC set to  0.000000
5/11/2010	9:39:43 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	9:39:43 AM	Tube furnace set to 0
5/11/2010	9:41:04 AM	Helium valve closed
5/11/2010	9:41:04 AM	H2 valve closed
5/11/2010	9:41:04 AM	BCl3 valve closed
5/11/2010	9:41:04 AM	PH3 valve closed
5/11/2010	9:41:04 AM	SiCl4 pre valve closed
5/11/2010	9:41:04 AM	SiCl4 post valve closed
5/11/2010	9:41:04 AM	Main Vac valve closed
5/11/2010	9:41:04 AM	Bypass valve closed
5/11/2010	9:41:04 AM	Bubbler valve closed
5/11/2010	9:41:04 AM	Helium MFC set to  0.000000
5/11/2010	9:41:04 AM	H2 MFC set to  0.000000
5/11/2010	9:41:04 AM	BCl3 MFC set to  0.000000
5/11/2010	9:41:04 AM	SiCl4 MFC set to  0.000000
5/11/2010	9:41:04 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	9:41:04 AM	Tube furnace set to 0
5/11/2010	9:41:04 AM	Run finished at 9:41 AM
5/11/2010	9:41:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2010	9:46:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	9:46:29 AM	Recipe started at 9:46 AM
5/11/2010	9:46:29 AM	Helium valve closed
5/11/2010	9:46:29 AM	H2 valve closed
5/11/2010	9:46:29 AM	BCl3 valve closed
5/11/2010	9:46:29 AM	PH3 valve closed
5/11/2010	9:46:29 AM	SiCl4 pre valve closed
5/11/2010	9:46:29 AM	SiCl4 post valve closed
5/11/2010	9:46:29 AM	Main Vac valve closed
5/11/2010	9:46:29 AM	Bubbler valve closed
5/11/2010	9:46:29 AM	Bypass valve opened
5/11/2010	9:46:29 AM	Helium MFC set to  0.000000
5/11/2010	9:46:29 AM	H2 MFC set to  0.000000
5/11/2010	9:46:29 AM	BCl3 MFC set to  0.000000
5/11/2010	9:46:29 AM	SiCl4 MFC set to  0.000000
5/11/2010	9:46:29 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	9:46:29 AM	Tube furnace set to 0
5/11/2010	9:47:14 AM	Helium valve closed
5/11/2010	9:47:14 AM	H2 valve closed
5/11/2010	9:47:14 AM	BCl3 valve closed
5/11/2010	9:47:14 AM	PH3 valve closed
5/11/2010	9:47:14 AM	SiCl4 pre valve closed
5/11/2010	9:47:14 AM	SiCl4 post valve closed
5/11/2010	9:47:14 AM	Bubbler valve closed
5/11/2010	9:47:14 AM	Main Vac valve opened
5/11/2010	9:47:14 AM	Bypass valve opened
5/11/2010	9:47:14 AM	Helium MFC set to  0.000000
5/11/2010	9:47:14 AM	H2 MFC set to  0.000000
5/11/2010	9:47:14 AM	BCl3 MFC set to  0.000000
5/11/2010	9:47:14 AM	SiCl4 MFC set to  0.000000
5/11/2010	9:47:14 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	9:47:14 AM	Tube furnace set to 0
5/11/2010	9:47:15 AM	Run finished at 9:47 AM
5/11/2010	9:47:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	10:10:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2010	10:10:48 AM	Recipe started at 10:10 AM
5/11/2010	10:10:48 AM	H2 valve closed
5/11/2010	10:10:48 AM	BCl3 valve closed
5/11/2010	10:10:48 AM	PH3 valve closed
5/11/2010	10:10:48 AM	SiCl4 pre valve closed
5/11/2010	10:10:48 AM	SiCl4 post valve closed
5/11/2010	10:10:48 AM	Main Vac valve closed
5/11/2010	10:10:48 AM	Bypass valve closed
5/11/2010	10:10:48 AM	Bubbler valve closed
5/11/2010	10:10:48 AM	Helium valve opened
5/11/2010	10:10:48 AM	Helium MFC set to  500.000000
5/11/2010	10:10:48 AM	H2 MFC set to  0.000000
5/11/2010	10:10:48 AM	BCl3 MFC set to  0.000000
5/11/2010	10:10:48 AM	SiCl4 MFC set to  0.000000
5/11/2010	10:10:48 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:10:48 AM	Tube furnace set to 0
5/11/2010	10:12:09 AM	Helium valve closed
5/11/2010	10:12:09 AM	H2 valve closed
5/11/2010	10:12:09 AM	BCl3 valve closed
5/11/2010	10:12:09 AM	PH3 valve closed
5/11/2010	10:12:09 AM	SiCl4 pre valve closed
5/11/2010	10:12:09 AM	SiCl4 post valve closed
5/11/2010	10:12:09 AM	Main Vac valve closed
5/11/2010	10:12:09 AM	Bypass valve closed
5/11/2010	10:12:09 AM	Bubbler valve closed
5/11/2010	10:12:09 AM	Helium MFC set to  0.000000
5/11/2010	10:12:09 AM	H2 MFC set to  0.000000
5/11/2010	10:12:09 AM	BCl3 MFC set to  0.000000
5/11/2010	10:12:09 AM	SiCl4 MFC set to  0.000000
5/11/2010	10:12:09 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:12:09 AM	Tube furnace set to 0
5/11/2010	10:12:09 AM	Run finished at 10:12 AM
5/11/2010	10:12:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2010	10:19:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	10:19:19 AM	Recipe started at 10:19 AM
5/11/2010	10:19:19 AM	Helium valve closed
5/11/2010	10:19:19 AM	H2 valve closed
5/11/2010	10:19:19 AM	BCl3 valve closed
5/11/2010	10:19:19 AM	PH3 valve closed
5/11/2010	10:19:19 AM	SiCl4 pre valve closed
5/11/2010	10:19:19 AM	SiCl4 post valve closed
5/11/2010	10:19:19 AM	Main Vac valve closed
5/11/2010	10:19:19 AM	Bubbler valve closed
5/11/2010	10:19:19 AM	Bypass valve opened
5/11/2010	10:19:19 AM	Helium MFC set to  0.000000
5/11/2010	10:19:19 AM	H2 MFC set to  0.000000
5/11/2010	10:19:19 AM	BCl3 MFC set to  0.000000
5/11/2010	10:19:19 AM	SiCl4 MFC set to  0.000000
5/11/2010	10:19:19 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:19:19 AM	Tube furnace set to 0
5/11/2010	10:20:04 AM	Helium valve closed
5/11/2010	10:20:04 AM	H2 valve closed
5/11/2010	10:20:04 AM	BCl3 valve closed
5/11/2010	10:20:04 AM	PH3 valve closed
5/11/2010	10:20:04 AM	SiCl4 pre valve closed
5/11/2010	10:20:04 AM	SiCl4 post valve closed
5/11/2010	10:20:04 AM	Bubbler valve closed
5/11/2010	10:20:04 AM	Main Vac valve opened
5/11/2010	10:20:04 AM	Bypass valve opened
5/11/2010	10:20:04 AM	Helium MFC set to  0.000000
5/11/2010	10:20:04 AM	H2 MFC set to  0.000000
5/11/2010	10:20:04 AM	BCl3 MFC set to  0.000000
5/11/2010	10:20:04 AM	SiCl4 MFC set to  0.000000
5/11/2010	10:20:04 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:20:05 AM	Tube furnace set to 0
5/11/2010	10:20:05 AM	Run finished at 10:20 AM
5/11/2010	10:20:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	10:21:11 AM	Helium MFC set to  100.000000
5/11/2010	10:21:14 AM	Helium valve opened
5/11/2010	10:21:48 AM	Helium valve closed
5/11/2010	10:22:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2010	10:22:07 AM	Recipe started at 10:22 AM
5/11/2010	10:22:07 AM	H2 valve closed
5/11/2010	10:22:07 AM	BCl3 valve closed
5/11/2010	10:22:07 AM	PH3 valve closed
5/11/2010	10:22:07 AM	SiCl4 pre valve closed
5/11/2010	10:22:07 AM	SiCl4 post valve closed
5/11/2010	10:22:07 AM	Main Vac valve closed
5/11/2010	10:22:07 AM	Bypass valve closed
5/11/2010	10:22:07 AM	Bubbler valve closed
5/11/2010	10:22:07 AM	Helium valve opened
5/11/2010	10:22:07 AM	Helium MFC set to  500.000000
5/11/2010	10:22:07 AM	H2 MFC set to  0.000000
5/11/2010	10:22:07 AM	BCl3 MFC set to  0.000000
5/11/2010	10:22:07 AM	SiCl4 MFC set to  0.000000
5/11/2010	10:22:07 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:22:07 AM	Tube furnace set to 0
5/11/2010	10:23:28 AM	Helium valve closed
5/11/2010	10:23:28 AM	H2 valve closed
5/11/2010	10:23:28 AM	BCl3 valve closed
5/11/2010	10:23:28 AM	PH3 valve closed
5/11/2010	10:23:28 AM	SiCl4 pre valve closed
5/11/2010	10:23:28 AM	SiCl4 post valve closed
5/11/2010	10:23:28 AM	Main Vac valve closed
5/11/2010	10:23:28 AM	Bypass valve closed
5/11/2010	10:23:28 AM	Bubbler valve closed
5/11/2010	10:23:28 AM	Helium MFC set to  0.000000
5/11/2010	10:23:28 AM	H2 MFC set to  0.000000
5/11/2010	10:23:28 AM	BCl3 MFC set to  0.000000
5/11/2010	10:23:28 AM	SiCl4 MFC set to  0.000000
5/11/2010	10:23:28 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:23:28 AM	Tube furnace set to 0
5/11/2010	10:23:28 AM	Run finished at 10:23 AM
5/11/2010	10:23:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/11/2010	10:27:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	10:27:10 AM	Recipe started at 10:27 AM
5/11/2010	10:27:10 AM	Helium valve closed
5/11/2010	10:27:10 AM	H2 valve closed
5/11/2010	10:27:10 AM	BCl3 valve closed
5/11/2010	10:27:10 AM	PH3 valve closed
5/11/2010	10:27:10 AM	SiCl4 pre valve closed
5/11/2010	10:27:10 AM	SiCl4 post valve closed
5/11/2010	10:27:10 AM	Main Vac valve closed
5/11/2010	10:27:10 AM	Bubbler valve closed
5/11/2010	10:27:10 AM	Bypass valve opened
5/11/2010	10:27:10 AM	Helium MFC set to  0.000000
5/11/2010	10:27:10 AM	H2 MFC set to  0.000000
5/11/2010	10:27:10 AM	BCl3 MFC set to  0.000000
5/11/2010	10:27:10 AM	SiCl4 MFC set to  0.000000
5/11/2010	10:27:10 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:27:10 AM	Tube furnace set to 0
5/11/2010	10:27:55 AM	Helium valve closed
5/11/2010	10:27:55 AM	H2 valve closed
5/11/2010	10:27:55 AM	BCl3 valve closed
5/11/2010	10:27:55 AM	PH3 valve closed
5/11/2010	10:27:55 AM	SiCl4 pre valve closed
5/11/2010	10:27:55 AM	SiCl4 post valve closed
5/11/2010	10:27:55 AM	Bubbler valve closed
5/11/2010	10:27:55 AM	Main Vac valve opened
5/11/2010	10:27:55 AM	Bypass valve opened
5/11/2010	10:27:55 AM	Helium MFC set to  0.000000
5/11/2010	10:27:55 AM	H2 MFC set to  0.000000
5/11/2010	10:27:55 AM	BCl3 MFC set to  0.000000
5/11/2010	10:27:55 AM	SiCl4 MFC set to  0.000000
5/11/2010	10:27:55 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:27:55 AM	Tube furnace set to 0
5/11/2010	10:27:56 AM	Run finished at 10:27 AM
5/11/2010	10:27:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	10:28:03 AM	Helium MFC set to  100.000000
5/11/2010	10:28:04 AM	Helium valve opened
5/11/2010	10:32:42 AM	Helium valve closed
5/11/2010	10:33:42 AM	Helium valve opened
5/11/2010	10:41:48 AM	Helium valve closed
5/11/2010	10:43:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/11/2010	10:43:31 AM	Recipe started at 10:43 AM
5/11/2010	10:43:31 AM	Helium valve closed
5/11/2010	10:43:31 AM	H2 valve closed
5/11/2010	10:43:31 AM	BCl3 valve closed
5/11/2010	10:43:31 AM	PH3 valve closed
5/11/2010	10:43:31 AM	SiCl4 pre valve closed
5/11/2010	10:43:31 AM	SiCl4 post valve closed
5/11/2010	10:43:31 AM	Main Vac valve closed
5/11/2010	10:43:31 AM	Bypass valve closed
5/11/2010	10:43:31 AM	Bubbler valve closed
5/11/2010	10:43:31 AM	Helium MFC set to  0.000000
5/11/2010	10:43:31 AM	H2 MFC set to  0.000000
5/11/2010	10:43:31 AM	BCl3 MFC set to  0.000000
5/11/2010	10:43:31 AM	SiCl4 MFC set to  0.000000
5/11/2010	10:43:31 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:43:32 AM	Tube furnace set to 0
5/11/2010	10:43:32 AM	Run finished at 10:43 AM
5/11/2010	10:43:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/11/2010	10:43:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	10:43:42 AM	Recipe started at 10:43 AM
5/11/2010	10:43:42 AM	Helium valve closed
5/11/2010	10:43:42 AM	H2 valve closed
5/11/2010	10:43:42 AM	BCl3 valve closed
5/11/2010	10:43:42 AM	PH3 valve closed
5/11/2010	10:43:42 AM	SiCl4 pre valve closed
5/11/2010	10:43:42 AM	SiCl4 post valve closed
5/11/2010	10:43:42 AM	Main Vac valve closed
5/11/2010	10:43:42 AM	Bubbler valve closed
5/11/2010	10:43:42 AM	Bypass valve opened
5/11/2010	10:43:42 AM	Helium MFC set to  0.000000
5/11/2010	10:43:42 AM	H2 MFC set to  0.000000
5/11/2010	10:43:42 AM	BCl3 MFC set to  0.000000
5/11/2010	10:43:42 AM	SiCl4 MFC set to  0.000000
5/11/2010	10:43:42 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:43:42 AM	Tube furnace set to 0
5/11/2010	10:43:42 AM	Helium valve closed
5/11/2010	10:43:42 AM	H2 valve closed
5/11/2010	10:43:42 AM	BCl3 valve closed
5/11/2010	10:43:42 AM	PH3 valve closed
5/11/2010	10:43:42 AM	SiCl4 pre valve closed
5/11/2010	10:43:42 AM	SiCl4 post valve closed
5/11/2010	10:43:42 AM	Bubbler valve closed
5/11/2010	10:43:42 AM	Main Vac valve opened
5/11/2010	10:43:42 AM	Bypass valve opened
5/11/2010	10:43:42 AM	Helium MFC set to  0.000000
5/11/2010	10:43:42 AM	H2 MFC set to  0.000000
5/11/2010	10:43:42 AM	BCl3 MFC set to  0.000000
5/11/2010	10:43:42 AM	SiCl4 MFC set to  0.000000
5/11/2010	10:43:42 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:43:42 AM	Tube furnace set to 0
5/11/2010	10:43:43 AM	Run finished at 10:43 AM
5/11/2010	10:43:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	10:44:28 AM	Helium MFC set to  100.000000
5/11/2010	10:44:30 AM	Helium valve opened
5/11/2010	10:55:52 AM	Helium valve closed
5/11/2010	10:57:18 AM	Recipe started at 10:57 AM
5/11/2010	10:57:18 AM	Helium valve closed
5/11/2010	10:57:18 AM	BCl3 valve closed
5/11/2010	10:57:18 AM	PH3 valve closed
5/11/2010	10:57:18 AM	SiCl4 pre valve closed
5/11/2010	10:57:18 AM	SiCl4 post valve closed
5/11/2010	10:57:18 AM	Main Vac valve closed
5/11/2010	10:57:18 AM	Bypass valve closed
5/11/2010	10:57:18 AM	Bubbler valve closed
5/11/2010	10:57:18 AM	H2 valve opened
5/11/2010	10:57:18 AM	Helium MFC set to  0.000000
5/11/2010	10:57:18 AM	H2 MFC set to  500.000000
5/11/2010	10:57:18 AM	BCl3 MFC set to  0.000000
5/11/2010	10:57:18 AM	SiCl4 MFC set to  0.000000
5/11/2010	10:57:18 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:57:18 AM	Tube furnace set to 0
5/11/2010	10:58:41 AM	Helium valve closed
5/11/2010	10:58:41 AM	BCl3 valve closed
5/11/2010	10:58:41 AM	PH3 valve closed
5/11/2010	10:58:41 AM	SiCl4 pre valve closed
5/11/2010	10:58:41 AM	SiCl4 post valve closed
5/11/2010	10:58:41 AM	Main Vac valve closed
5/11/2010	10:58:41 AM	Bypass valve closed
5/11/2010	10:58:41 AM	H2 valve opened
5/11/2010	10:58:41 AM	Bubbler valve opened
5/11/2010	10:58:41 AM	Helium MFC set to  0.000000
5/11/2010	10:58:41 AM	H2 MFC set to  500.000000
5/11/2010	10:58:41 AM	BCl3 MFC set to  0.000000
5/11/2010	10:58:41 AM	SiCl4 MFC set to  0.000000
5/11/2010	10:58:41 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:58:42 AM	Tube furnace set to 1000
5/11/2010	11:18:42 AM	Helium valve closed
5/11/2010	11:18:42 AM	BCl3 valve closed
5/11/2010	11:18:42 AM	PH3 valve closed
5/11/2010	11:18:42 AM	Main Vac valve closed
5/11/2010	11:18:42 AM	Bypass valve closed
5/11/2010	11:18:42 AM	H2 valve opened
5/11/2010	11:18:42 AM	SiCl4 pre valve opened
5/11/2010	11:18:42 AM	SiCl4 post valve opened
5/11/2010	11:18:42 AM	Bubbler valve opened
5/11/2010	11:18:42 AM	Helium MFC set to  0.000000
5/11/2010	11:18:42 AM	H2 MFC set to  500.000000
5/11/2010	11:18:42 AM	BCl3 MFC set to  0.000000
5/11/2010	11:18:42 AM	SiCl4 MFC set to  325.000000
5/11/2010	11:18:42 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	11:18:42 AM	Tube furnace set to 1000
5/11/2010	11:38:42 AM	H2 valve closed
5/11/2010	11:38:42 AM	BCl3 valve closed
5/11/2010	11:38:42 AM	PH3 valve closed
5/11/2010	11:38:42 AM	SiCl4 pre valve closed
5/11/2010	11:38:42 AM	SiCl4 post valve closed
5/11/2010	11:38:42 AM	Main Vac valve closed
5/11/2010	11:38:42 AM	Bypass valve closed
5/11/2010	11:38:42 AM	Helium valve opened
5/11/2010	11:38:42 AM	Bubbler valve opened
5/11/2010	11:38:42 AM	Helium MFC set to  500.000000
5/11/2010	11:38:42 AM	H2 MFC set to  0.000000
5/11/2010	11:38:42 AM	BCl3 MFC set to  0.000000
5/11/2010	11:38:42 AM	SiCl4 MFC set to  0.000000
5/11/2010	11:38:42 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	11:38:42 AM	Tube furnace set to 750
5/11/2010	11:58:42 AM	H2 valve closed
5/11/2010	11:58:42 AM	BCl3 valve closed
5/11/2010	11:58:42 AM	PH3 valve closed
5/11/2010	11:58:42 AM	SiCl4 pre valve closed
5/11/2010	11:58:42 AM	SiCl4 post valve closed
5/11/2010	11:58:42 AM	Main Vac valve closed
5/11/2010	11:58:42 AM	Bypass valve closed
5/11/2010	11:58:42 AM	Helium valve opened
5/11/2010	11:58:42 AM	Bubbler valve opened
5/11/2010	11:58:42 AM	Helium MFC set to  500.000000
5/11/2010	11:58:42 AM	H2 MFC set to  0.000000
5/11/2010	11:58:42 AM	BCl3 MFC set to  0.000000
5/11/2010	11:58:42 AM	SiCl4 MFC set to  0.000000
5/11/2010	11:58:42 AM	Bypass solenoid MFC set to  0.000000
5/11/2010	11:58:42 AM	Tube furnace set to 0
5/11/2010	12:07:08 PM	Helium valve closed
5/11/2010	12:07:08 PM	H2 valve closed
5/11/2010	12:07:08 PM	BCl3 valve closed
5/11/2010	12:07:08 PM	PH3 valve closed
5/11/2010	12:07:08 PM	SiCl4 pre valve closed
5/11/2010	12:07:08 PM	SiCl4 post valve closed
5/11/2010	12:07:08 PM	Main Vac valve closed
5/11/2010	12:07:08 PM	Bypass valve closed
5/11/2010	12:07:08 PM	Bubbler valve closed
5/11/2010	12:07:08 PM	Helium MFC set to  0.000000
5/11/2010	12:07:08 PM	H2 MFC set to  0.000000
5/11/2010	12:07:08 PM	BCl3 MFC set to  0.000000
5/11/2010	12:07:08 PM	SiCl4 MFC set to  0.000000
5/11/2010	12:07:08 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	12:07:08 PM	Tube furnace set to 0
5/11/2010	12:07:08 PM	Run finished at 12:07 PM
5/11/2010	12:13:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	12:13:30 PM	Recipe started at 12:13 PM
5/11/2010	12:13:30 PM	Helium valve closed
5/11/2010	12:13:30 PM	H2 valve closed
5/11/2010	12:13:30 PM	BCl3 valve closed
5/11/2010	12:13:30 PM	PH3 valve closed
5/11/2010	12:13:30 PM	SiCl4 pre valve closed
5/11/2010	12:13:30 PM	SiCl4 post valve closed
5/11/2010	12:13:30 PM	Main Vac valve closed
5/11/2010	12:13:30 PM	Bubbler valve closed
5/11/2010	12:13:30 PM	Bypass valve opened
5/11/2010	12:13:30 PM	Helium MFC set to  0.000000
5/11/2010	12:13:30 PM	H2 MFC set to  0.000000
5/11/2010	12:13:30 PM	BCl3 MFC set to  0.000000
5/11/2010	12:13:30 PM	SiCl4 MFC set to  0.000000
5/11/2010	12:13:30 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	12:13:30 PM	Tube furnace set to 0
5/11/2010	12:14:16 PM	Helium valve closed
5/11/2010	12:14:16 PM	H2 valve closed
5/11/2010	12:14:16 PM	BCl3 valve closed
5/11/2010	12:14:16 PM	PH3 valve closed
5/11/2010	12:14:16 PM	SiCl4 pre valve closed
5/11/2010	12:14:16 PM	SiCl4 post valve closed
5/11/2010	12:14:16 PM	Bubbler valve closed
5/11/2010	12:14:16 PM	Main Vac valve opened
5/11/2010	12:14:16 PM	Bypass valve opened
5/11/2010	12:14:16 PM	Helium MFC set to  0.000000
5/11/2010	12:14:16 PM	H2 MFC set to  0.000000
5/11/2010	12:14:16 PM	BCl3 MFC set to  0.000000
5/11/2010	12:14:16 PM	SiCl4 MFC set to  0.000000
5/11/2010	12:14:16 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	12:14:16 PM	Tube furnace set to 0
5/11/2010	12:14:17 PM	Run finished at 12:14 PM
5/11/2010	12:14:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	12:16:56 PM	Helium MFC set to  100.000000
5/11/2010	12:16:58 PM	Helium valve opened
5/11/2010	12:32:40 PM	Helium valve closed
5/11/2010	12:34:01 PM	Recipe started at 12:34 PM
5/11/2010	12:34:01 PM	Helium valve closed
5/11/2010	12:34:01 PM	BCl3 valve closed
5/11/2010	12:34:01 PM	PH3 valve closed
5/11/2010	12:34:01 PM	SiCl4 pre valve closed
5/11/2010	12:34:01 PM	SiCl4 post valve closed
5/11/2010	12:34:01 PM	Main Vac valve closed
5/11/2010	12:34:01 PM	Bypass valve closed
5/11/2010	12:34:01 PM	Bubbler valve closed
5/11/2010	12:34:01 PM	H2 valve opened
5/11/2010	12:34:01 PM	Helium MFC set to  0.000000
5/11/2010	12:34:01 PM	H2 MFC set to  500.000000
5/11/2010	12:34:01 PM	BCl3 MFC set to  0.000000
5/11/2010	12:34:01 PM	SiCl4 MFC set to  0.000000
5/11/2010	12:34:01 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	12:34:01 PM	Tube furnace set to 0
5/11/2010	12:35:23 PM	Helium valve closed
5/11/2010	12:35:23 PM	BCl3 valve closed
5/11/2010	12:35:23 PM	PH3 valve closed
5/11/2010	12:35:23 PM	SiCl4 pre valve closed
5/11/2010	12:35:23 PM	SiCl4 post valve closed
5/11/2010	12:35:23 PM	Main Vac valve closed
5/11/2010	12:35:23 PM	Bypass valve closed
5/11/2010	12:35:23 PM	H2 valve opened
5/11/2010	12:35:23 PM	Bubbler valve opened
5/11/2010	12:35:23 PM	Helium MFC set to  0.000000
5/11/2010	12:35:23 PM	H2 MFC set to  500.000000
5/11/2010	12:35:23 PM	BCl3 MFC set to  0.000000
5/11/2010	12:35:23 PM	SiCl4 MFC set to  0.000000
5/11/2010	12:35:23 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	12:35:23 PM	Tube furnace set to 1000
5/11/2010	12:55:23 PM	Helium valve closed
5/11/2010	12:55:23 PM	BCl3 valve closed
5/11/2010	12:55:23 PM	PH3 valve closed
5/11/2010	12:55:23 PM	Main Vac valve closed
5/11/2010	12:55:23 PM	Bypass valve closed
5/11/2010	12:55:23 PM	H2 valve opened
5/11/2010	12:55:23 PM	SiCl4 pre valve opened
5/11/2010	12:55:23 PM	SiCl4 post valve opened
5/11/2010	12:55:23 PM	Bubbler valve opened
5/11/2010	12:55:23 PM	Helium MFC set to  0.000000
5/11/2010	12:55:23 PM	H2 MFC set to  500.000000
5/11/2010	12:55:23 PM	BCl3 MFC set to  0.000000
5/11/2010	12:55:23 PM	SiCl4 MFC set to  450.000000
5/11/2010	12:55:23 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	12:55:23 PM	Tube furnace set to 1000
5/11/2010	1:15:23 PM	H2 valve closed
5/11/2010	1:15:23 PM	BCl3 valve closed
5/11/2010	1:15:23 PM	PH3 valve closed
5/11/2010	1:15:23 PM	SiCl4 pre valve closed
5/11/2010	1:15:23 PM	SiCl4 post valve closed
5/11/2010	1:15:23 PM	Main Vac valve closed
5/11/2010	1:15:23 PM	Bypass valve closed
5/11/2010	1:15:23 PM	Helium valve opened
5/11/2010	1:15:23 PM	Bubbler valve opened
5/11/2010	1:15:23 PM	Helium MFC set to  500.000000
5/11/2010	1:15:23 PM	H2 MFC set to  0.000000
5/11/2010	1:15:23 PM	BCl3 MFC set to  0.000000
5/11/2010	1:15:23 PM	SiCl4 MFC set to  0.000000
5/11/2010	1:15:23 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	1:15:23 PM	Tube furnace set to 750
5/11/2010	1:35:23 PM	H2 valve closed
5/11/2010	1:35:23 PM	BCl3 valve closed
5/11/2010	1:35:23 PM	PH3 valve closed
5/11/2010	1:35:23 PM	SiCl4 pre valve closed
5/11/2010	1:35:23 PM	SiCl4 post valve closed
5/11/2010	1:35:23 PM	Main Vac valve closed
5/11/2010	1:35:23 PM	Bypass valve closed
5/11/2010	1:35:23 PM	Helium valve opened
5/11/2010	1:35:23 PM	Bubbler valve opened
5/11/2010	1:35:23 PM	Helium MFC set to  500.000000
5/11/2010	1:35:23 PM	H2 MFC set to  0.000000
5/11/2010	1:35:23 PM	BCl3 MFC set to  0.000000
5/11/2010	1:35:23 PM	SiCl4 MFC set to  0.000000
5/11/2010	1:35:23 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	1:35:24 PM	Tube furnace set to 0
5/11/2010	1:37:00 PM	Helium valve closed
5/11/2010	1:37:00 PM	H2 valve closed
5/11/2010	1:37:00 PM	BCl3 valve closed
5/11/2010	1:37:00 PM	PH3 valve closed
5/11/2010	1:37:00 PM	SiCl4 pre valve closed
5/11/2010	1:37:00 PM	SiCl4 post valve closed
5/11/2010	1:37:00 PM	Main Vac valve closed
5/11/2010	1:37:00 PM	Bypass valve closed
5/11/2010	1:37:00 PM	Bubbler valve closed
5/11/2010	1:37:00 PM	Helium MFC set to  0.000000
5/11/2010	1:37:00 PM	H2 MFC set to  0.000000
5/11/2010	1:37:00 PM	BCl3 MFC set to  0.000000
5/11/2010	1:37:00 PM	SiCl4 MFC set to  0.000000
5/11/2010	1:37:00 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	1:37:00 PM	Tube furnace set to 0
5/11/2010	1:37:01 PM	Run finished at 1:37 PM
5/11/2010	1:44:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	1:44:31 PM	Recipe started at 1:44 PM
5/11/2010	1:44:31 PM	Helium valve closed
5/11/2010	1:44:31 PM	H2 valve closed
5/11/2010	1:44:31 PM	BCl3 valve closed
5/11/2010	1:44:31 PM	PH3 valve closed
5/11/2010	1:44:31 PM	SiCl4 pre valve closed
5/11/2010	1:44:31 PM	SiCl4 post valve closed
5/11/2010	1:44:31 PM	Main Vac valve closed
5/11/2010	1:44:31 PM	Bubbler valve closed
5/11/2010	1:44:31 PM	Bypass valve opened
5/11/2010	1:44:31 PM	Helium MFC set to  0.000000
5/11/2010	1:44:31 PM	H2 MFC set to  0.000000
5/11/2010	1:44:31 PM	BCl3 MFC set to  0.000000
5/11/2010	1:44:31 PM	SiCl4 MFC set to  0.000000
5/11/2010	1:44:31 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	1:44:32 PM	Tube furnace set to 0
5/11/2010	1:45:18 PM	Helium valve closed
5/11/2010	1:45:18 PM	H2 valve closed
5/11/2010	1:45:18 PM	BCl3 valve closed
5/11/2010	1:45:18 PM	PH3 valve closed
5/11/2010	1:45:18 PM	SiCl4 pre valve closed
5/11/2010	1:45:18 PM	SiCl4 post valve closed
5/11/2010	1:45:18 PM	Bubbler valve closed
5/11/2010	1:45:18 PM	Main Vac valve opened
5/11/2010	1:45:18 PM	Bypass valve opened
5/11/2010	1:45:18 PM	Helium MFC set to  0.000000
5/11/2010	1:45:18 PM	H2 MFC set to  0.000000
5/11/2010	1:45:18 PM	BCl3 MFC set to  0.000000
5/11/2010	1:45:18 PM	SiCl4 MFC set to  0.000000
5/11/2010	1:45:18 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	1:45:18 PM	Tube furnace set to 0
5/11/2010	1:45:19 PM	Run finished at 1:45 PM
5/11/2010	1:45:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	1:45:46 PM	Helium MFC set to  100.000000
5/11/2010	1:45:46 PM	Helium valve opened
5/11/2010	1:48:47 PM	Helium valve closed
5/11/2010	1:49:36 PM	Helium valve opened
5/11/2010	1:50:59 PM	Helium valve closed
5/11/2010	1:52:18 PM	Helium valve opened
5/11/2010	1:54:45 PM	Helium valve closed
5/11/2010	1:56:10 PM	Helium valve opened
5/11/2010	2:02:58 PM	Helium valve closed
5/11/2010	2:05:07 PM	Recipe started at 2:05 PM
5/11/2010	2:05:07 PM	Helium valve closed
5/11/2010	2:05:07 PM	BCl3 valve closed
5/11/2010	2:05:07 PM	PH3 valve closed
5/11/2010	2:05:07 PM	SiCl4 pre valve closed
5/11/2010	2:05:07 PM	SiCl4 post valve closed
5/11/2010	2:05:07 PM	Main Vac valve closed
5/11/2010	2:05:07 PM	Bypass valve closed
5/11/2010	2:05:07 PM	Bubbler valve closed
5/11/2010	2:05:07 PM	H2 valve opened
5/11/2010	2:05:07 PM	Helium MFC set to  0.000000
5/11/2010	2:05:07 PM	H2 MFC set to  500.000000
5/11/2010	2:05:07 PM	BCl3 MFC set to  0.000000
5/11/2010	2:05:07 PM	SiCl4 MFC set to  0.000000
5/11/2010	2:05:07 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	2:05:07 PM	Tube furnace set to 0
5/11/2010	2:06:26 PM	Helium valve closed
5/11/2010	2:06:26 PM	BCl3 valve closed
5/11/2010	2:06:26 PM	PH3 valve closed
5/11/2010	2:06:26 PM	SiCl4 pre valve closed
5/11/2010	2:06:26 PM	SiCl4 post valve closed
5/11/2010	2:06:26 PM	Main Vac valve closed
5/11/2010	2:06:26 PM	Bypass valve closed
5/11/2010	2:06:26 PM	H2 valve opened
5/11/2010	2:06:26 PM	Bubbler valve opened
5/11/2010	2:06:26 PM	Helium MFC set to  0.000000
5/11/2010	2:06:26 PM	H2 MFC set to  500.000000
5/11/2010	2:06:26 PM	BCl3 MFC set to  0.000000
5/11/2010	2:06:26 PM	SiCl4 MFC set to  0.000000
5/11/2010	2:06:26 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	2:06:26 PM	Tube furnace set to 1000
5/11/2010	2:26:26 PM	Helium valve closed
5/11/2010	2:26:26 PM	BCl3 valve closed
5/11/2010	2:26:26 PM	PH3 valve closed
5/11/2010	2:26:26 PM	Main Vac valve closed
5/11/2010	2:26:26 PM	Bypass valve closed
5/11/2010	2:26:26 PM	H2 valve opened
5/11/2010	2:26:26 PM	SiCl4 pre valve opened
5/11/2010	2:26:26 PM	SiCl4 post valve opened
5/11/2010	2:26:26 PM	Bubbler valve opened
5/11/2010	2:26:26 PM	Helium MFC set to  0.000000
5/11/2010	2:26:26 PM	H2 MFC set to  500.000000
5/11/2010	2:26:26 PM	BCl3 MFC set to  0.000000
5/11/2010	2:26:26 PM	SiCl4 MFC set to  500.000000
5/11/2010	2:26:26 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	2:26:27 PM	Tube furnace set to 1000
5/11/2010	2:46:27 PM	H2 valve closed
5/11/2010	2:46:27 PM	BCl3 valve closed
5/11/2010	2:46:27 PM	PH3 valve closed
5/11/2010	2:46:27 PM	SiCl4 pre valve closed
5/11/2010	2:46:27 PM	SiCl4 post valve closed
5/11/2010	2:46:27 PM	Main Vac valve closed
5/11/2010	2:46:27 PM	Bypass valve closed
5/11/2010	2:46:27 PM	Helium valve opened
5/11/2010	2:46:27 PM	Bubbler valve opened
5/11/2010	2:46:27 PM	Helium MFC set to  500.000000
5/11/2010	2:46:27 PM	H2 MFC set to  0.000000
5/11/2010	2:46:27 PM	BCl3 MFC set to  0.000000
5/11/2010	2:46:27 PM	SiCl4 MFC set to  0.000000
5/11/2010	2:46:27 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	2:46:27 PM	Tube furnace set to 750
5/11/2010	3:06:27 PM	H2 valve closed
5/11/2010	3:06:27 PM	BCl3 valve closed
5/11/2010	3:06:27 PM	PH3 valve closed
5/11/2010	3:06:27 PM	SiCl4 pre valve closed
5/11/2010	3:06:27 PM	SiCl4 post valve closed
5/11/2010	3:06:27 PM	Main Vac valve closed
5/11/2010	3:06:27 PM	Bypass valve closed
5/11/2010	3:06:27 PM	Helium valve opened
5/11/2010	3:06:27 PM	Bubbler valve opened
5/11/2010	3:06:27 PM	Helium MFC set to  500.000000
5/11/2010	3:06:27 PM	H2 MFC set to  0.000000
5/11/2010	3:06:27 PM	BCl3 MFC set to  0.000000
5/11/2010	3:06:27 PM	SiCl4 MFC set to  0.000000
5/11/2010	3:06:27 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	3:06:27 PM	Tube furnace set to 0
5/11/2010	3:14:58 PM	Helium valve closed
5/11/2010	3:14:58 PM	H2 valve closed
5/11/2010	3:14:58 PM	BCl3 valve closed
5/11/2010	3:14:58 PM	PH3 valve closed
5/11/2010	3:14:58 PM	SiCl4 pre valve closed
5/11/2010	3:14:58 PM	SiCl4 post valve closed
5/11/2010	3:14:58 PM	Main Vac valve closed
5/11/2010	3:14:58 PM	Bypass valve closed
5/11/2010	3:14:58 PM	Bubbler valve closed
5/11/2010	3:14:58 PM	Helium MFC set to  0.000000
5/11/2010	3:14:58 PM	H2 MFC set to  0.000000
5/11/2010	3:14:58 PM	BCl3 MFC set to  0.000000
5/11/2010	3:14:58 PM	SiCl4 MFC set to  0.000000
5/11/2010	3:14:58 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	3:14:58 PM	Tube furnace set to 0
5/11/2010	3:14:58 PM	Run finished at 3:14 PM
5/11/2010	3:18:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	3:18:38 PM	Recipe started at 3:18 PM
5/11/2010	3:18:38 PM	Helium valve closed
5/11/2010	3:18:38 PM	H2 valve closed
5/11/2010	3:18:38 PM	BCl3 valve closed
5/11/2010	3:18:38 PM	PH3 valve closed
5/11/2010	3:18:38 PM	SiCl4 pre valve closed
5/11/2010	3:18:38 PM	SiCl4 post valve closed
5/11/2010	3:18:38 PM	Main Vac valve closed
5/11/2010	3:18:38 PM	Bubbler valve closed
5/11/2010	3:18:38 PM	Bypass valve opened
5/11/2010	3:18:38 PM	Helium MFC set to  0.000000
5/11/2010	3:18:38 PM	H2 MFC set to  0.000000
5/11/2010	3:18:38 PM	BCl3 MFC set to  0.000000
5/11/2010	3:18:38 PM	SiCl4 MFC set to  0.000000
5/11/2010	3:18:38 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	3:18:38 PM	Tube furnace set to 0
5/11/2010	3:19:24 PM	Helium valve closed
5/11/2010	3:19:24 PM	H2 valve closed
5/11/2010	3:19:24 PM	BCl3 valve closed
5/11/2010	3:19:24 PM	PH3 valve closed
5/11/2010	3:19:24 PM	SiCl4 pre valve closed
5/11/2010	3:19:24 PM	SiCl4 post valve closed
5/11/2010	3:19:24 PM	Bubbler valve closed
5/11/2010	3:19:24 PM	Main Vac valve opened
5/11/2010	3:19:24 PM	Bypass valve opened
5/11/2010	3:19:24 PM	Helium MFC set to  0.000000
5/11/2010	3:19:24 PM	H2 MFC set to  0.000000
5/11/2010	3:19:24 PM	BCl3 MFC set to  0.000000
5/11/2010	3:19:24 PM	SiCl4 MFC set to  0.000000
5/11/2010	3:19:24 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	3:19:24 PM	Tube furnace set to 0
5/11/2010	3:19:24 PM	Run finished at 3:19 PM
5/11/2010	3:19:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	3:21:44 PM	Helium MFC set to  100.000000
5/11/2010	3:21:45 PM	Helium valve opened
5/11/2010	3:31:55 PM	Helium valve closed
5/11/2010	3:43:01 PM	Helium valve opened
5/11/2010	3:43:38 PM	Helium valve closed
5/11/2010	3:47:06 PM	Recipe started at 3:47 PM
5/11/2010	3:47:06 PM	Helium valve closed
5/11/2010	3:47:06 PM	BCl3 valve closed
5/11/2010	3:47:06 PM	PH3 valve closed
5/11/2010	3:47:06 PM	SiCl4 pre valve closed
5/11/2010	3:47:06 PM	SiCl4 post valve closed
5/11/2010	3:47:06 PM	Main Vac valve closed
5/11/2010	3:47:06 PM	Bypass valve closed
5/11/2010	3:47:06 PM	Bubbler valve closed
5/11/2010	3:47:06 PM	H2 valve opened
5/11/2010	3:47:06 PM	Helium MFC set to  0.000000
5/11/2010	3:47:06 PM	H2 MFC set to  500.000000
5/11/2010	3:47:06 PM	BCl3 MFC set to  0.000000
5/11/2010	3:47:06 PM	SiCl4 MFC set to  0.000000
5/11/2010	3:47:06 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	3:47:06 PM	Tube furnace set to 0
5/11/2010	3:48:26 PM	Helium valve closed
5/11/2010	3:48:26 PM	BCl3 valve closed
5/11/2010	3:48:26 PM	PH3 valve closed
5/11/2010	3:48:26 PM	SiCl4 pre valve closed
5/11/2010	3:48:26 PM	SiCl4 post valve closed
5/11/2010	3:48:26 PM	Main Vac valve closed
5/11/2010	3:48:26 PM	Bypass valve closed
5/11/2010	3:48:26 PM	H2 valve opened
5/11/2010	3:48:26 PM	Bubbler valve opened
5/11/2010	3:48:26 PM	Helium MFC set to  0.000000
5/11/2010	3:48:26 PM	H2 MFC set to  500.000000
5/11/2010	3:48:26 PM	BCl3 MFC set to  0.000000
5/11/2010	3:48:26 PM	SiCl4 MFC set to  0.000000
5/11/2010	3:48:26 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	3:48:26 PM	Tube furnace set to 1000
5/11/2010	4:08:26 PM	Helium valve closed
5/11/2010	4:08:26 PM	BCl3 valve closed
5/11/2010	4:08:26 PM	PH3 valve closed
5/11/2010	4:08:26 PM	Main Vac valve closed
5/11/2010	4:08:26 PM	Bypass valve closed
5/11/2010	4:08:26 PM	H2 valve opened
5/11/2010	4:08:26 PM	SiCl4 pre valve opened
5/11/2010	4:08:26 PM	SiCl4 post valve opened
5/11/2010	4:08:26 PM	Bubbler valve opened
5/11/2010	4:08:26 PM	Helium MFC set to  0.000000
5/11/2010	4:08:26 PM	H2 MFC set to  500.000000
5/11/2010	4:08:26 PM	BCl3 MFC set to  0.000000
5/11/2010	4:08:26 PM	SiCl4 MFC set to  500.000000
5/11/2010	4:08:26 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	4:08:26 PM	Tube furnace set to 1000
5/11/2010	4:30:26 PM	H2 valve closed
5/11/2010	4:30:26 PM	BCl3 valve closed
5/11/2010	4:30:26 PM	PH3 valve closed
5/11/2010	4:30:26 PM	SiCl4 pre valve closed
5/11/2010	4:30:26 PM	SiCl4 post valve closed
5/11/2010	4:30:26 PM	Main Vac valve closed
5/11/2010	4:30:26 PM	Bypass valve closed
5/11/2010	4:30:26 PM	Helium valve opened
5/11/2010	4:30:26 PM	Bubbler valve opened
5/11/2010	4:30:26 PM	Helium MFC set to  500.000000
5/11/2010	4:30:26 PM	H2 MFC set to  0.000000
5/11/2010	4:30:26 PM	BCl3 MFC set to  0.000000
5/11/2010	4:30:26 PM	SiCl4 MFC set to  0.000000
5/11/2010	4:30:26 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	4:30:26 PM	Tube furnace set to 750
5/11/2010	4:50:26 PM	H2 valve closed
5/11/2010	4:50:26 PM	BCl3 valve closed
5/11/2010	4:50:26 PM	PH3 valve closed
5/11/2010	4:50:26 PM	SiCl4 pre valve closed
5/11/2010	4:50:26 PM	SiCl4 post valve closed
5/11/2010	4:50:26 PM	Main Vac valve closed
5/11/2010	4:50:26 PM	Bypass valve closed
5/11/2010	4:50:26 PM	Helium valve opened
5/11/2010	4:50:26 PM	Bubbler valve opened
5/11/2010	4:50:26 PM	Helium MFC set to  500.000000
5/11/2010	4:50:26 PM	H2 MFC set to  0.000000
5/11/2010	4:50:26 PM	BCl3 MFC set to  0.000000
5/11/2010	4:50:26 PM	SiCl4 MFC set to  0.000000
5/11/2010	4:50:26 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	4:50:26 PM	Tube furnace set to 0
5/11/2010	4:52:47 PM	Helium valve closed
5/11/2010	4:52:47 PM	H2 valve closed
5/11/2010	4:52:47 PM	BCl3 valve closed
5/11/2010	4:52:47 PM	PH3 valve closed
5/11/2010	4:52:47 PM	SiCl4 pre valve closed
5/11/2010	4:52:47 PM	SiCl4 post valve closed
5/11/2010	4:52:47 PM	Main Vac valve closed
5/11/2010	4:52:47 PM	Bypass valve closed
5/11/2010	4:52:47 PM	Bubbler valve closed
5/11/2010	4:52:47 PM	Helium MFC set to  0.000000
5/11/2010	4:52:47 PM	H2 MFC set to  0.000000
5/11/2010	4:52:47 PM	BCl3 MFC set to  0.000000
5/11/2010	4:52:47 PM	SiCl4 MFC set to  0.000000
5/11/2010	4:52:47 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	4:52:47 PM	Tube furnace set to 0
5/11/2010	4:52:47 PM	Run finished at 4:52 PM
5/11/2010	5:04:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	5:04:29 PM	Recipe started at 5:04 PM
5/11/2010	5:04:29 PM	Helium valve closed
5/11/2010	5:04:29 PM	H2 valve closed
5/11/2010	5:04:29 PM	BCl3 valve closed
5/11/2010	5:04:29 PM	PH3 valve closed
5/11/2010	5:04:29 PM	SiCl4 pre valve closed
5/11/2010	5:04:29 PM	SiCl4 post valve closed
5/11/2010	5:04:29 PM	Main Vac valve closed
5/11/2010	5:04:29 PM	Bubbler valve closed
5/11/2010	5:04:29 PM	Bypass valve opened
5/11/2010	5:04:29 PM	Helium MFC set to  0.000000
5/11/2010	5:04:29 PM	H2 MFC set to  0.000000
5/11/2010	5:04:29 PM	BCl3 MFC set to  0.000000
5/11/2010	5:04:29 PM	SiCl4 MFC set to  0.000000
5/11/2010	5:04:29 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	5:04:29 PM	Tube furnace set to 0
5/11/2010	5:05:16 PM	Helium valve closed
5/11/2010	5:05:16 PM	H2 valve closed
5/11/2010	5:05:16 PM	BCl3 valve closed
5/11/2010	5:05:16 PM	PH3 valve closed
5/11/2010	5:05:16 PM	SiCl4 pre valve closed
5/11/2010	5:05:16 PM	SiCl4 post valve closed
5/11/2010	5:05:16 PM	Bubbler valve closed
5/11/2010	5:05:16 PM	Main Vac valve opened
5/11/2010	5:05:16 PM	Bypass valve opened
5/11/2010	5:05:16 PM	Helium MFC set to  0.000000
5/11/2010	5:05:16 PM	H2 MFC set to  0.000000
5/11/2010	5:05:16 PM	BCl3 MFC set to  0.000000
5/11/2010	5:05:16 PM	SiCl4 MFC set to  0.000000
5/11/2010	5:05:16 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	5:05:16 PM	Tube furnace set to 0
5/11/2010	5:05:16 PM	Run finished at 5:05 PM
5/11/2010	5:05:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	5:05:43 PM	Helium MFC set to  100.000000
5/11/2010	5:05:44 PM	Helium valve opened
5/11/2010	5:25:03 PM	Program started after a nonstandard shutdown
5/11/2010	5:25:06 PM	Helium valve closed
5/11/2010	5:25:06 PM	H2 valve closed
5/11/2010	5:25:07 PM	BCl3 valve closed
5/11/2010	5:25:07 PM	PH3 valve closed
5/11/2010	5:25:07 PM	SiCl4 pre valve closed
5/11/2010	5:25:07 PM	SiCl4 post valve closed
5/11/2010	5:25:07 PM	Main Vac valve closed
5/11/2010	5:25:07 PM	Bypass valve closed
5/11/2010	5:25:07 PM	Bubbler valve closed
5/11/2010	5:25:07 PM	Helium MFC set to  0.000000
5/11/2010	5:25:07 PM	H2 MFC set to  0.000000
5/11/2010	5:25:07 PM	BCl3 MFC set to  0.000000
5/11/2010	5:25:07 PM	SiCl4 MFC set to  0.000000
5/11/2010	5:25:07 PM	Bypass solenoid MFC set to  760.000000
5/11/2010	5:25:07 PM	Tube furnace set to 0
5/11/2010	5:25:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	5:25:17 PM	Recipe started at 5:25 PM
5/11/2010	5:25:18 PM	Helium valve closed
5/11/2010	5:25:18 PM	H2 valve closed
5/11/2010	5:25:18 PM	BCl3 valve closed
5/11/2010	5:25:18 PM	PH3 valve closed
5/11/2010	5:25:18 PM	SiCl4 pre valve closed
5/11/2010	5:25:18 PM	SiCl4 post valve closed
5/11/2010	5:25:18 PM	Main Vac valve closed
5/11/2010	5:25:18 PM	Bubbler valve closed
5/11/2010	5:25:18 PM	Bypass valve opened
5/11/2010	5:25:18 PM	Helium MFC set to  0.000000
5/11/2010	5:25:18 PM	H2 MFC set to  0.000000
5/11/2010	5:25:18 PM	BCl3 MFC set to  0.000000
5/11/2010	5:25:18 PM	SiCl4 MFC set to  0.000000
5/11/2010	5:25:18 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	5:25:18 PM	Tube furnace set to 0
5/11/2010	5:25:18 PM	Helium valve closed
5/11/2010	5:25:18 PM	H2 valve closed
5/11/2010	5:25:18 PM	BCl3 valve closed
5/11/2010	5:25:18 PM	PH3 valve closed
5/11/2010	5:25:18 PM	SiCl4 pre valve closed
5/11/2010	5:25:19 PM	SiCl4 post valve closed
5/11/2010	5:25:19 PM	Bubbler valve closed
5/11/2010	5:25:19 PM	Main Vac valve opened
5/11/2010	5:25:19 PM	Bypass valve opened
5/11/2010	5:25:19 PM	Helium MFC set to  0.000000
5/11/2010	5:25:19 PM	H2 MFC set to  0.000000
5/11/2010	5:25:19 PM	BCl3 MFC set to  0.000000
5/11/2010	5:25:19 PM	SiCl4 MFC set to  0.000000
5/11/2010	5:25:19 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	5:25:19 PM	Tube furnace set to 0
5/11/2010	5:25:19 PM	Run finished at 5:25 PM
5/11/2010	5:25:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	5:30:08 PM	Helium MFC set to  100.000000
5/11/2010	5:30:10 PM	Helium valve opened
5/11/2010	5:34:13 PM	Helium valve closed
5/11/2010	5:35:31 PM	Recipe started at 5:35 PM
5/11/2010	5:35:31 PM	Helium valve closed
5/11/2010	5:35:31 PM	BCl3 valve closed
5/11/2010	5:35:31 PM	PH3 valve closed
5/11/2010	5:35:31 PM	SiCl4 pre valve closed
5/11/2010	5:35:31 PM	SiCl4 post valve closed
5/11/2010	5:35:31 PM	Main Vac valve closed
5/11/2010	5:35:31 PM	Bypass valve closed
5/11/2010	5:35:31 PM	Bubbler valve closed
5/11/2010	5:35:31 PM	H2 valve opened
5/11/2010	5:35:31 PM	Helium MFC set to  0.000000
5/11/2010	5:35:31 PM	H2 MFC set to  500.000000
5/11/2010	5:35:31 PM	BCl3 MFC set to  0.000000
5/11/2010	5:35:31 PM	SiCl4 MFC set to  0.000000
5/11/2010	5:35:31 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	5:35:31 PM	Tube furnace set to 0
5/11/2010	5:36:52 PM	Helium valve closed
5/11/2010	5:36:52 PM	BCl3 valve closed
5/11/2010	5:36:52 PM	PH3 valve closed
5/11/2010	5:36:52 PM	SiCl4 pre valve closed
5/11/2010	5:36:52 PM	SiCl4 post valve closed
5/11/2010	5:36:52 PM	Main Vac valve closed
5/11/2010	5:36:52 PM	Bypass valve closed
5/11/2010	5:36:52 PM	H2 valve opened
5/11/2010	5:36:52 PM	Bubbler valve opened
5/11/2010	5:36:52 PM	Helium MFC set to  0.000000
5/11/2010	5:36:52 PM	H2 MFC set to  500.000000
5/11/2010	5:36:52 PM	BCl3 MFC set to  0.000000
5/11/2010	5:36:52 PM	SiCl4 MFC set to  0.000000
5/11/2010	5:36:52 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	5:36:52 PM	Tube furnace set to 1000
5/11/2010	5:56:52 PM	Helium valve closed
5/11/2010	5:56:52 PM	BCl3 valve closed
5/11/2010	5:56:52 PM	PH3 valve closed
5/11/2010	5:56:52 PM	Main Vac valve closed
5/11/2010	5:56:52 PM	Bypass valve closed
5/11/2010	5:56:52 PM	H2 valve opened
5/11/2010	5:56:52 PM	SiCl4 pre valve opened
5/11/2010	5:56:52 PM	SiCl4 post valve opened
5/11/2010	5:56:52 PM	Bubbler valve opened
5/11/2010	5:56:52 PM	Helium MFC set to  0.000000
5/11/2010	5:56:52 PM	H2 MFC set to  500.000000
5/11/2010	5:56:52 PM	BCl3 MFC set to  0.000000
5/11/2010	5:56:52 PM	SiCl4 MFC set to  500.000000
5/11/2010	5:56:52 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	5:56:52 PM	Tube furnace set to 1000
5/11/2010	6:16:52 PM	H2 valve closed
5/11/2010	6:16:52 PM	BCl3 valve closed
5/11/2010	6:16:52 PM	PH3 valve closed
5/11/2010	6:16:52 PM	SiCl4 pre valve closed
5/11/2010	6:16:52 PM	SiCl4 post valve closed
5/11/2010	6:16:52 PM	Main Vac valve closed
5/11/2010	6:16:52 PM	Bypass valve closed
5/11/2010	6:16:52 PM	Helium valve opened
5/11/2010	6:16:52 PM	Bubbler valve opened
5/11/2010	6:16:52 PM	Helium MFC set to  500.000000
5/11/2010	6:16:52 PM	H2 MFC set to  0.000000
5/11/2010	6:16:52 PM	BCl3 MFC set to  0.000000
5/11/2010	6:16:52 PM	SiCl4 MFC set to  0.000000
5/11/2010	6:16:52 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	6:16:52 PM	Tube furnace set to 750
5/11/2010	6:36:52 PM	H2 valve closed
5/11/2010	6:36:52 PM	BCl3 valve closed
5/11/2010	6:36:52 PM	PH3 valve closed
5/11/2010	6:36:52 PM	SiCl4 pre valve closed
5/11/2010	6:36:52 PM	SiCl4 post valve closed
5/11/2010	6:36:52 PM	Main Vac valve closed
5/11/2010	6:36:52 PM	Bypass valve closed
5/11/2010	6:36:52 PM	Helium valve opened
5/11/2010	6:36:52 PM	Bubbler valve opened
5/11/2010	6:36:52 PM	Helium MFC set to  500.000000
5/11/2010	6:36:52 PM	H2 MFC set to  0.000000
5/11/2010	6:36:52 PM	BCl3 MFC set to  0.000000
5/11/2010	6:36:52 PM	SiCl4 MFC set to  0.000000
5/11/2010	6:36:52 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	6:36:52 PM	Tube furnace set to 0
5/11/2010	6:42:19 PM	Helium valve closed
5/11/2010	6:42:19 PM	H2 valve closed
5/11/2010	6:42:19 PM	BCl3 valve closed
5/11/2010	6:42:19 PM	PH3 valve closed
5/11/2010	6:42:19 PM	SiCl4 pre valve closed
5/11/2010	6:42:19 PM	SiCl4 post valve closed
5/11/2010	6:42:19 PM	Main Vac valve closed
5/11/2010	6:42:19 PM	Bypass valve closed
5/11/2010	6:42:19 PM	Bubbler valve closed
5/11/2010	6:42:19 PM	Helium MFC set to  0.000000
5/11/2010	6:42:19 PM	H2 MFC set to  0.000000
5/11/2010	6:42:19 PM	BCl3 MFC set to  0.000000
5/11/2010	6:42:19 PM	SiCl4 MFC set to  0.000000
5/11/2010	6:42:19 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	6:42:19 PM	Tube furnace set to 0
5/11/2010	6:42:19 PM	Run finished at 6:42 PM
5/11/2010	6:45:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	6:45:37 PM	Recipe started at 6:45 PM
5/11/2010	6:45:37 PM	Helium valve closed
5/11/2010	6:45:37 PM	H2 valve closed
5/11/2010	6:45:38 PM	BCl3 valve closed
5/11/2010	6:45:38 PM	PH3 valve closed
5/11/2010	6:45:38 PM	SiCl4 pre valve closed
5/11/2010	6:45:38 PM	SiCl4 post valve closed
5/11/2010	6:45:38 PM	Main Vac valve closed
5/11/2010	6:45:38 PM	Bubbler valve closed
5/11/2010	6:45:38 PM	Bypass valve opened
5/11/2010	6:45:38 PM	Helium MFC set to  0.000000
5/11/2010	6:45:38 PM	H2 MFC set to  0.000000
5/11/2010	6:45:38 PM	BCl3 MFC set to  0.000000
5/11/2010	6:45:38 PM	SiCl4 MFC set to  0.000000
5/11/2010	6:45:38 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	6:45:38 PM	Tube furnace set to 0
5/11/2010	6:46:24 PM	Helium valve closed
5/11/2010	6:46:24 PM	H2 valve closed
5/11/2010	6:46:24 PM	BCl3 valve closed
5/11/2010	6:46:24 PM	PH3 valve closed
5/11/2010	6:46:24 PM	SiCl4 pre valve closed
5/11/2010	6:46:24 PM	SiCl4 post valve closed
5/11/2010	6:46:24 PM	Bubbler valve closed
5/11/2010	6:46:24 PM	Main Vac valve opened
5/11/2010	6:46:24 PM	Bypass valve opened
5/11/2010	6:46:24 PM	Helium MFC set to  0.000000
5/11/2010	6:46:24 PM	H2 MFC set to  0.000000
5/11/2010	6:46:24 PM	BCl3 MFC set to  0.000000
5/11/2010	6:46:24 PM	SiCl4 MFC set to  0.000000
5/11/2010	6:46:24 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	6:46:24 PM	Tube furnace set to 0
5/11/2010	6:46:24 PM	Run finished at 6:46 PM
5/11/2010	6:46:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	8:57:26 PM	Helium MFC set to  100.000000
5/11/2010	8:57:28 PM	Helium valve opened
5/11/2010	9:07:58 PM	Helium valve closed
5/11/2010	9:10:18 PM	Recipe started at 9:10 PM
5/11/2010	9:10:19 PM	Helium valve closed
5/11/2010	9:10:19 PM	BCl3 valve closed
5/11/2010	9:10:19 PM	PH3 valve closed
5/11/2010	9:10:19 PM	SiCl4 pre valve closed
5/11/2010	9:10:19 PM	SiCl4 post valve closed
5/11/2010	9:10:19 PM	Main Vac valve closed
5/11/2010	9:10:19 PM	Bypass valve closed
5/11/2010	9:10:19 PM	Bubbler valve closed
5/11/2010	9:10:19 PM	H2 valve opened
5/11/2010	9:10:19 PM	Helium MFC set to  0.000000
5/11/2010	9:10:19 PM	H2 MFC set to  500.000000
5/11/2010	9:10:19 PM	BCl3 MFC set to  0.000000
5/11/2010	9:10:19 PM	SiCl4 MFC set to  0.000000
5/11/2010	9:10:19 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	9:10:19 PM	Tube furnace set to 0
5/11/2010	9:11:43 PM	Helium valve closed
5/11/2010	9:11:43 PM	BCl3 valve closed
5/11/2010	9:11:43 PM	PH3 valve closed
5/11/2010	9:11:43 PM	SiCl4 pre valve closed
5/11/2010	9:11:43 PM	SiCl4 post valve closed
5/11/2010	9:11:43 PM	Main Vac valve closed
5/11/2010	9:11:43 PM	Bypass valve closed
5/11/2010	9:11:43 PM	H2 valve opened
5/11/2010	9:11:43 PM	Bubbler valve opened
5/11/2010	9:11:43 PM	Helium MFC set to  0.000000
5/11/2010	9:11:43 PM	H2 MFC set to  500.000000
5/11/2010	9:11:43 PM	BCl3 MFC set to  0.000000
5/11/2010	9:11:43 PM	SiCl4 MFC set to  0.000000
5/11/2010	9:11:43 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	9:11:43 PM	Tube furnace set to 1000
5/11/2010	9:31:43 PM	Helium valve closed
5/11/2010	9:31:43 PM	BCl3 valve closed
5/11/2010	9:31:43 PM	PH3 valve closed
5/11/2010	9:31:43 PM	Main Vac valve closed
5/11/2010	9:31:43 PM	Bypass valve closed
5/11/2010	9:31:43 PM	H2 valve opened
5/11/2010	9:31:43 PM	SiCl4 pre valve opened
5/11/2010	9:31:43 PM	SiCl4 post valve opened
5/11/2010	9:31:43 PM	Bubbler valve opened
5/11/2010	9:31:43 PM	Helium MFC set to  0.000000
5/11/2010	9:31:43 PM	H2 MFC set to  500.000000
5/11/2010	9:31:43 PM	BCl3 MFC set to  0.000000
5/11/2010	9:31:43 PM	SiCl4 MFC set to  500.000000
5/11/2010	9:31:43 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	9:31:43 PM	Tube furnace set to 1000
5/11/2010	9:51:43 PM	H2 valve closed
5/11/2010	9:51:43 PM	BCl3 valve closed
5/11/2010	9:51:43 PM	PH3 valve closed
5/11/2010	9:51:43 PM	SiCl4 pre valve closed
5/11/2010	9:51:43 PM	SiCl4 post valve closed
5/11/2010	9:51:43 PM	Main Vac valve closed
5/11/2010	9:51:43 PM	Bypass valve closed
5/11/2010	9:51:43 PM	Helium valve opened
5/11/2010	9:51:43 PM	Bubbler valve opened
5/11/2010	9:51:43 PM	Helium MFC set to  500.000000
5/11/2010	9:51:43 PM	H2 MFC set to  0.000000
5/11/2010	9:51:43 PM	BCl3 MFC set to  0.000000
5/11/2010	9:51:43 PM	SiCl4 MFC set to  0.000000
5/11/2010	9:51:43 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	9:51:43 PM	Tube furnace set to 750
5/11/2010	10:11:43 PM	H2 valve closed
5/11/2010	10:11:43 PM	BCl3 valve closed
5/11/2010	10:11:43 PM	PH3 valve closed
5/11/2010	10:11:43 PM	SiCl4 pre valve closed
5/11/2010	10:11:43 PM	SiCl4 post valve closed
5/11/2010	10:11:43 PM	Main Vac valve closed
5/11/2010	10:11:43 PM	Bypass valve closed
5/11/2010	10:11:43 PM	Helium valve opened
5/11/2010	10:11:43 PM	Bubbler valve opened
5/11/2010	10:11:43 PM	Helium MFC set to  500.000000
5/11/2010	10:11:43 PM	H2 MFC set to  0.000000
5/11/2010	10:11:43 PM	BCl3 MFC set to  0.000000
5/11/2010	10:11:43 PM	SiCl4 MFC set to  0.000000
5/11/2010	10:11:43 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:11:43 PM	Tube furnace set to 0
5/11/2010	10:21:30 PM	Helium valve closed
5/11/2010	10:21:30 PM	H2 valve closed
5/11/2010	10:21:30 PM	BCl3 valve closed
5/11/2010	10:21:30 PM	PH3 valve closed
5/11/2010	10:21:30 PM	SiCl4 pre valve closed
5/11/2010	10:21:30 PM	SiCl4 post valve closed
5/11/2010	10:21:30 PM	Main Vac valve closed
5/11/2010	10:21:30 PM	Bypass valve closed
5/11/2010	10:21:30 PM	Bubbler valve closed
5/11/2010	10:21:30 PM	Helium MFC set to  0.000000
5/11/2010	10:21:30 PM	H2 MFC set to  0.000000
5/11/2010	10:21:30 PM	BCl3 MFC set to  0.000000
5/11/2010	10:21:30 PM	SiCl4 MFC set to  0.000000
5/11/2010	10:21:30 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:21:30 PM	Tube furnace set to 0
5/11/2010	10:21:30 PM	Run finished at 10:21 PM
5/11/2010	10:25:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	10:25:03 PM	Recipe started at 10:25 PM
5/11/2010	10:25:03 PM	Helium valve closed
5/11/2010	10:25:03 PM	H2 valve closed
5/11/2010	10:25:03 PM	BCl3 valve closed
5/11/2010	10:25:03 PM	PH3 valve closed
5/11/2010	10:25:03 PM	SiCl4 pre valve closed
5/11/2010	10:25:03 PM	SiCl4 post valve closed
5/11/2010	10:25:03 PM	Main Vac valve closed
5/11/2010	10:25:03 PM	Bubbler valve closed
5/11/2010	10:25:03 PM	Bypass valve opened
5/11/2010	10:25:03 PM	Helium MFC set to  0.000000
5/11/2010	10:25:03 PM	H2 MFC set to  0.000000
5/11/2010	10:25:03 PM	BCl3 MFC set to  0.000000
5/11/2010	10:25:03 PM	SiCl4 MFC set to  0.000000
5/11/2010	10:25:03 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:25:04 PM	Tube furnace set to 0
5/11/2010	10:25:50 PM	Helium valve closed
5/11/2010	10:25:50 PM	H2 valve closed
5/11/2010	10:25:50 PM	BCl3 valve closed
5/11/2010	10:25:50 PM	PH3 valve closed
5/11/2010	10:25:50 PM	SiCl4 pre valve closed
5/11/2010	10:25:50 PM	SiCl4 post valve closed
5/11/2010	10:25:50 PM	Bubbler valve closed
5/11/2010	10:25:50 PM	Main Vac valve opened
5/11/2010	10:25:50 PM	Bypass valve opened
5/11/2010	10:25:50 PM	Helium MFC set to  0.000000
5/11/2010	10:25:50 PM	H2 MFC set to  0.000000
5/11/2010	10:25:50 PM	BCl3 MFC set to  0.000000
5/11/2010	10:25:50 PM	SiCl4 MFC set to  0.000000
5/11/2010	10:25:50 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:25:50 PM	Tube furnace set to 0
5/11/2010	10:25:50 PM	Run finished at 10:25 PM
5/11/2010	10:25:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	10:26:56 PM	Helium MFC set to  100.000000
5/11/2010	10:26:57 PM	Helium valve opened
5/11/2010	10:32:48 PM	Helium valve closed
5/11/2010	10:33:39 PM	Helium valve opened
5/11/2010	10:38:42 PM	Helium valve closed
5/11/2010	10:39:24 PM	Recipe started at 10:39 PM
5/11/2010	10:39:24 PM	Helium valve closed
5/11/2010	10:39:24 PM	BCl3 valve closed
5/11/2010	10:39:24 PM	PH3 valve closed
5/11/2010	10:39:24 PM	SiCl4 pre valve closed
5/11/2010	10:39:24 PM	SiCl4 post valve closed
5/11/2010	10:39:24 PM	Main Vac valve closed
5/11/2010	10:39:24 PM	Bypass valve closed
5/11/2010	10:39:24 PM	Bubbler valve closed
5/11/2010	10:39:24 PM	H2 valve opened
5/11/2010	10:39:24 PM	Helium MFC set to  0.000000
5/11/2010	10:39:24 PM	H2 MFC set to  500.000000
5/11/2010	10:39:24 PM	BCl3 MFC set to  0.000000
5/11/2010	10:39:24 PM	SiCl4 MFC set to  0.000000
5/11/2010	10:39:24 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:39:24 PM	Tube furnace set to 0
5/11/2010	10:40:44 PM	Helium valve closed
5/11/2010	10:40:44 PM	BCl3 valve closed
5/11/2010	10:40:44 PM	PH3 valve closed
5/11/2010	10:40:44 PM	SiCl4 pre valve closed
5/11/2010	10:40:44 PM	SiCl4 post valve closed
5/11/2010	10:40:44 PM	Main Vac valve closed
5/11/2010	10:40:44 PM	Bypass valve closed
5/11/2010	10:40:44 PM	H2 valve opened
5/11/2010	10:40:44 PM	Bubbler valve opened
5/11/2010	10:40:44 PM	Helium MFC set to  0.000000
5/11/2010	10:40:44 PM	H2 MFC set to  500.000000
5/11/2010	10:40:44 PM	BCl3 MFC set to  0.000000
5/11/2010	10:40:44 PM	SiCl4 MFC set to  0.000000
5/11/2010	10:40:44 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	10:40:44 PM	Tube furnace set to 1000
5/11/2010	11:00:44 PM	Helium valve closed
5/11/2010	11:00:44 PM	BCl3 valve closed
5/11/2010	11:00:44 PM	PH3 valve closed
5/11/2010	11:00:44 PM	Main Vac valve closed
5/11/2010	11:00:44 PM	Bypass valve closed
5/11/2010	11:00:44 PM	H2 valve opened
5/11/2010	11:00:44 PM	SiCl4 pre valve opened
5/11/2010	11:00:44 PM	SiCl4 post valve opened
5/11/2010	11:00:44 PM	Bubbler valve opened
5/11/2010	11:00:44 PM	Helium MFC set to  0.000000
5/11/2010	11:00:44 PM	H2 MFC set to  500.000000
5/11/2010	11:00:44 PM	BCl3 MFC set to  0.000000
5/11/2010	11:00:44 PM	SiCl4 MFC set to  500.000000
5/11/2010	11:00:44 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	11:00:44 PM	Tube furnace set to 1000
5/11/2010	11:20:44 PM	H2 valve closed
5/11/2010	11:20:44 PM	BCl3 valve closed
5/11/2010	11:20:44 PM	PH3 valve closed
5/11/2010	11:20:44 PM	SiCl4 pre valve closed
5/11/2010	11:20:44 PM	SiCl4 post valve closed
5/11/2010	11:20:44 PM	Main Vac valve closed
5/11/2010	11:20:44 PM	Bypass valve closed
5/11/2010	11:20:44 PM	Helium valve opened
5/11/2010	11:20:44 PM	Bubbler valve opened
5/11/2010	11:20:44 PM	Helium MFC set to  500.000000
5/11/2010	11:20:44 PM	H2 MFC set to  0.000000
5/11/2010	11:20:44 PM	BCl3 MFC set to  0.000000
5/11/2010	11:20:44 PM	SiCl4 MFC set to  0.000000
5/11/2010	11:20:44 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	11:20:45 PM	Tube furnace set to 750
5/11/2010	11:40:45 PM	H2 valve closed
5/11/2010	11:40:45 PM	BCl3 valve closed
5/11/2010	11:40:45 PM	PH3 valve closed
5/11/2010	11:40:45 PM	SiCl4 pre valve closed
5/11/2010	11:40:45 PM	SiCl4 post valve closed
5/11/2010	11:40:45 PM	Main Vac valve closed
5/11/2010	11:40:45 PM	Bypass valve closed
5/11/2010	11:40:45 PM	Helium valve opened
5/11/2010	11:40:45 PM	Bubbler valve opened
5/11/2010	11:40:45 PM	Helium MFC set to  500.000000
5/11/2010	11:40:45 PM	H2 MFC set to  0.000000
5/11/2010	11:40:45 PM	BCl3 MFC set to  0.000000
5/11/2010	11:40:45 PM	SiCl4 MFC set to  0.000000
5/11/2010	11:40:45 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	11:40:45 PM	Tube furnace set to 0
5/11/2010	11:46:39 PM	Helium valve closed
5/11/2010	11:46:39 PM	H2 valve closed
5/11/2010	11:46:39 PM	BCl3 valve closed
5/11/2010	11:46:39 PM	PH3 valve closed
5/11/2010	11:46:39 PM	SiCl4 pre valve closed
5/11/2010	11:46:39 PM	SiCl4 post valve closed
5/11/2010	11:46:39 PM	Main Vac valve closed
5/11/2010	11:46:39 PM	Bypass valve closed
5/11/2010	11:46:39 PM	Bubbler valve closed
5/11/2010	11:46:39 PM	Helium MFC set to  0.000000
5/11/2010	11:46:39 PM	H2 MFC set to  0.000000
5/11/2010	11:46:39 PM	BCl3 MFC set to  0.000000
5/11/2010	11:46:39 PM	SiCl4 MFC set to  0.000000
5/11/2010	11:46:39 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	11:46:39 PM	Tube furnace set to 0
5/11/2010	11:46:39 PM	Run finished at 11:46 PM
5/11/2010	11:50:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	11:50:28 PM	Recipe started at 11:50 PM
5/11/2010	11:50:28 PM	Helium valve closed
5/11/2010	11:50:28 PM	H2 valve closed
5/11/2010	11:50:28 PM	BCl3 valve closed
5/11/2010	11:50:28 PM	PH3 valve closed
5/11/2010	11:50:28 PM	SiCl4 pre valve closed
5/11/2010	11:50:28 PM	SiCl4 post valve closed
5/11/2010	11:50:28 PM	Main Vac valve closed
5/11/2010	11:50:28 PM	Bubbler valve closed
5/11/2010	11:50:28 PM	Bypass valve opened
5/11/2010	11:50:28 PM	Helium MFC set to  0.000000
5/11/2010	11:50:28 PM	H2 MFC set to  0.000000
5/11/2010	11:50:28 PM	BCl3 MFC set to  0.000000
5/11/2010	11:50:28 PM	SiCl4 MFC set to  0.000000
5/11/2010	11:50:28 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	11:50:28 PM	Tube furnace set to 0
5/11/2010	11:51:14 PM	Helium valve closed
5/11/2010	11:51:14 PM	H2 valve closed
5/11/2010	11:51:14 PM	BCl3 valve closed
5/11/2010	11:51:14 PM	PH3 valve closed
5/11/2010	11:51:14 PM	SiCl4 pre valve closed
5/11/2010	11:51:14 PM	SiCl4 post valve closed
5/11/2010	11:51:14 PM	Bubbler valve closed
5/11/2010	11:51:14 PM	Main Vac valve opened
5/11/2010	11:51:14 PM	Bypass valve opened
5/11/2010	11:51:14 PM	Helium MFC set to  0.000000
5/11/2010	11:51:14 PM	H2 MFC set to  0.000000
5/11/2010	11:51:14 PM	BCl3 MFC set to  0.000000
5/11/2010	11:51:14 PM	SiCl4 MFC set to  0.000000
5/11/2010	11:51:14 PM	Bypass solenoid MFC set to  0.000000
5/11/2010	11:51:15 PM	Tube furnace set to 0
5/11/2010	11:51:15 PM	Run finished at 11:51 PM
5/11/2010	11:51:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/11/2010	11:58:04 PM	Helium MFC set to  50.000000
5/11/2010	11:58:05 PM	Helium valve opened
